SEM Microcharacterization of Semiconductors (eBook)

Front Cover 1
SEM Microcharacterization of Semiconductors 4
Copyright Page 5
Table of Contents 6
Contributors 8
Preface 10
Foreword 12
Part A: Foundations of Microcharacterization in Electron Beam Instruments 16
Chapter 1. An Introduction to Multimode Scanning Electron Microscopy 18
List of symbols 18
1.1 The SEM as a two-component system: signals, modes and contrast 20
1.2 Resolution: the specification of instrumental capabilities 23
1.3 Instrumentation 31
1.4 Types of electron beam instruments 40
References 42
Chapter 2. Modeling Electron Beam Interactions in Semiconductors 44
List of symbols 44
2.1 Introduction 46
2.2 Electron scattering 46
2.3 Monte Carlo electron trajectory simulation 60
2.4 Summary 76
References 77
Appendix 78
Chapter 3. Electron Channeling Patterns 84
List of symbols 84
3.1 Introduction 85
3.2 ECP contrast 86
3.3 Information in channeling patterns 98
3.4 Channeling micrographs 113
3.5 Selected area channeling patterns (SACP) 115
3.6 Using selected area channeling pattern 120
3.7 Other techniques for SEM crystallography 128
References 131
Appendix 133
Chapter 4. The Emissive Mode and X-ray Microanalysis 134
List of symbols 134
4.1 Signals in the emissive mode 135
4.2 Detectors for imaging 138
4.3 Secondary electron imaging modes 143
4.4 Backscattered imaging modes 149
4.5 X-ray microanalysis 153
4.6 Quantitative microanalysis 155
4.7 Qualitative X-ray analysis of an unknown 159
4.8 Quantitative X-ray analysis 161
References 164
Part B: Quantitation and the Interpretation of Signals in the Individual Modes 166
Chapter 5. Voltage Contrast and Stroboscopy 168
List of symbols 168
5.1 Introduction 169
5.2 Principles 171
5.3 Instrumentation 192
5.4 Applications 221
5.5 Recent developments 250
References 253
Chapter 6. The Conductive Mode 256
List of symbols 257
6.1 Basic physical principles 260
6.2 Detection systems and contacts 275
6.3 EBIC and EBIV measurements 277
6.4 Theory of EBIC and CL defect contrast 311
6.5 ß-Conductivity 342
References 348
Chapter 7. Scanning Deep Level Transient Spectroscopy 354
List of symbols 354
7.1 Introduction 355
7.2 Fundamentals 360
7.3 Special techniques 370
7.4 Applications 380
7.5 Conclusions 384
Acknowledgements 385
References 385
Chapter 8. Cathodoluminescence Characterization of Semiconductors 388
List of symbols 389
8.1 Introduction 389
8.2 Luminescence phenomena 391
8.3 Cathodoluminescence 402
8.4 Cathodoluminescence analysis techniques 412
8.5 Applications 418
Bibliography 433
References 434
Chapter 9. The Electron Acoustic Mode 440
List of symbols 440
9.1 Introduction 441
9.2 Origin of SEAM signals and contrasts 442
9.3 Experimental conditions for SEAM 446
9.4 Application of SEAM to semiconductor characterization 451
9.5 Conclusions 459
Acknowledgements 459
References 459
Index 462