Micro and Nanomechanics, Volume 5 (eBook)

LaVern Starman–Air Force Research Laboratory, USA; Jenny Hay – Nanomechanics Inc., USA; Nikhil Karanjgaokar – Worchester Polytech Institute, USA

Preface 6
Contents 8
1 A Stochastic Multi-Scale Model for Predicting MEMS Stiction Failure 9
1.1 Introduction 9
1.2 Humid Stiction of Rough Surfaces 10
1.3 Modelling Method 11
1.3.1 The Random Apparent Contact Forces 12
1.3.2 The Stochastic Model of the Apparent Adhesive Contact Forces 12
1.4 Numerical Results 13
1.4.1 Problem Setting 13
1.4.2 Implementation 14
1.4.3 Results 14
1.5 Conclusions 15
References 16
2 Full-Field Identification of Interfaces in Microelectronic Devices 17
2.1 Introduction 17
2.2 Cohesive Zone Models 18
2.3 Integrated Digital Image Correlation 18
2.4 Double Clamped Beam Experiment 19
2.5 Conclusions and Future Work 20
References 21
3 Experimental Study of Microstructure and Mechanical Property of Cu30Zn6Al Alloy 22
3.1 Introduction 22
3.2 Experimental Methods 22
3.3 Results and Discussion 23
3.4 Conclusion 25
References 27
4 Boundary Mechanics in Lath Martensite, Studied by Uni-Axial Micro-Tensile Tests 28
4.1 Introduction 28
4.2 Experiment 29
4.3 Results and Discussion 29
4.3.1 Samples with Boundaries Parallel to the Loading Direction 29
4.3.2 Samples with Boundaries Tilted to the Loading Direction 30
4.4 Overview of All Tested Specimens 31
4.5 Conclusion 32
References 32
5 Evaluating Indent Pile-Up with Gold Films on Non-Plastically Deforming Substrates 33
5.1 Introduction 33
5.2 Experimental Procedure 34
5.3 Results and Discussion 34
5.4 Conclusions 37
References 38
6 Investigation of Size Effect Through In-Situ SEM Testing of Polystyrene Micropillars 39
6.1 Introduction 39
6.2 Constitutive Model 40
6.3 Experiments and Numerical Simulations 40
6.3.1 Fabrication of Polystyrene Micropillars 40
6.3.2 Testing Procedure 41
6.3.3 Finite Element (FE) Simulations 42
6.4 Results and Discussions 42
6.5 Conclusions 45
References 45
7 Temperature and Thickness Dependent Mechanical Properties of Ti/Ni Multilayer Thin Films 46
7.1 Introduction 46
7.2 Experimental Details 47
7.3 Results and Discussions 47
7.3.1 Microstructure Characterization 47
7.3.2 Hardness Characterization 50
7.3.2.1 Strengthening Mechanisms in As-Deposited Multilayers 50
7.3.2.2 Strengthening Mechanisms in Annealed Multilayers 51
7.3.2.3 Temperature-Thickness Dependent Strengthening Mechanism Map 51
7.4 Conclusions 52
References 53
8 A Novel Microdevice for In Situ Study of Mechano-Electrochemical Behaviorwith Controlled Temperature 55
8.1 Introduction 55
8.2 Microdevice for In Situ Thermo- Electrochemical Testing 56
8.3 Thermal Calibration 58
8.4 Conclusion 59
References 60
9 High-Rate Micro-Compression Using an Elastic Half-Space Loading Configuration 61
9.1 Introduction 61
9.2 Results 62
9.3 Discussion and Conclusion 65
References 65
10 Broadband Electromechanical Spectroscopy: A Method for Measuring the Dynamic Electromechanical Response of Ferroelectrics 66
10.1 Introduction 66
10.2 Materials and Methods 67
10.2.1 Force Control 68
10.2.2 Measuring the Specimen's Deflection and Twist 68
10.2.3 Electric Field Control and Measuring Electric Displacement 69
10.2.4 Materials 69
10.3 Experimental Results 70
10.3.1 Bending Experiments 70
10.3.2 Torsion Experiments 72
10.4 Conclusion 73
References 73
11 Dynamics of Microscale Granular Crystals 75
References 79